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[×ÊÔ´] ¡¾¾«Æ··ÖÏí¡¿Nano- and microelectromechanical systems¡¾ÒÑËÑË÷ÎÞÖØ¸´¡¿

Lyshevski, Sergey Edward.
Nano- and microelectromechanical systems : fundamentals of nano- and
microengineering / Sergey Edward Lyshevski
ISBN 0-8493-916-6 (alk. paper) © 2001 by CRC Press LLC
CONTENTS
1. Nano- and Microengineering,and Nano- and Microtechnologies
1.1. Introduction
1.2. Biological Analogies
1.3. Nano- and Microelectromechanical Systems
1.4. Applications of Nano- and Microelectromechanical Systems
1.5. Nano- and Microelectromechanical Systems
1.6. Introduction to MEMS Fabrication, Assembling, and Packaging
2. Mathematical Models and Design of Nano- and Microelectromechanical Systems
2.1. Nano- and Microelectromechanical Systems Architecture
2.2. Electromagnetics and its Application For Nano- and Microscale
Electromechanical Motion Devices
2.3. Classical Mechanics and its Application
2.3.1. Newtonian Mechanics
2.3.2. Lagrange Equations of Motion
2.3.3. Hamilton Equations of Motion
2.4. Atomic Structures and Quantum Mechanics
2.5. Molecular and Nanostructure Dynamics
2.5.1. Schrödinger Equation and Wavefunction Theory
2.5.2. Density Functional Theory
2.5.3. Nanostructures and Molecular Dynamics
2.6. Molecular Wires and Molecular Circuits
2.7 Thermoanalysis and Heat Equation
3. Structural Design, Modeling, and Simulation
3.1. Nano- and Microelectromechanical Systems
3.1.1. Carbon Nanotubes and Nanodevices
3.1.2. Microelectromechanical Systems and Microdevices
3.2. Structural Synthesis of Nano- and Microelectromechanical
Actuators and Sensors
3.2.1. Configurations and Structural Synthesis of Motion Nanoand
Microstructures (actuators and Sensors)
3.2.2. Algebra of Sets
3.3. Direct-Current Micromachines
3.4. Induction Motors
3.4.1. Two-Phase Induction Motors
3.4.2. Three-Phase Induction Motors
3.5. Microscale Synchronous Machines
3.5.1. Single-Phase Reluctance Motors
3.5.2. Permanent-Magnet Synchronous Machines
3.6. Microscale Permanent-Magnet Stepper Motors
3.6.1. Mathematical Model in the Machine Variables
3.6.2. Mathematical Models of Permanent-Magnet Stepper Motors in the Rotor and Synchronous Reference Frames
3.7. Nanomachines: Nanomotors and Nanogenerators
4. Control of Nano- and Microelectromechanical Systems
4.1. Fundamentals of Electromagnetic Radiation and Antennas in Nano- and Microscale Electromechanical Systems
4.2. Design of Closed-Loop Nano- and Microelectromechanical Systems Using the Lyapunov Stability Theory
4.3. Introduction to Intelligent Control of Nano- and Microelectromechanical Systems
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