ÒÑÈëפСľ³æ 20 Ìì
http://www.rdmicro.com
¹â¿Ì½º£¬¹èƬ£¬¸÷Öֳĵף¬ÌØÊâºÄ²Ä£¬Î¯Íмӹ¤
½­ËÕÊ¡ËÕÖÝÊй¤ÒµÔ°ÇøÈôˮ·398ºÅ ÖпÆÔºËÕÖÝÄÉÃ×ËùB705
ÁªÏµÈË: Ðì¼ÑÔ£ / ÓÊÏä: xujy@rdmicro.com / QQ: 154733475 / µç»°: 0512-68636965 / ÊÖ»ú: 13776045471
²é¿´: 3980  |  »Ø¸´: 107

ÑвÄ-jiali

¾èÖú¹ó±ö (СÓÐÃûÆø)

[É̼ҹ©Ó¦] ÑвÄ΢ÄÉ-ÈÈÏú¸÷¿î¹â¿Ì½º£¬SU-8ϵÁУ¬S1800ϵÁУ¬lift-off½ºµÈ£¬ÏÖ»õ£¡

±¾É̼ÒûÓвμÓÓŻݻ£¬Ò»ÆðÑûÇëËûÀ´²Î¼Ó°É ÎҵĴú½ðȯ

´ú½ðȯ0Ôª
ÏÞÁ¿ x ÕÅ
Âú x ¿ÉʹÓã»ÓÐЧÆÚ x Ì죻¹ýÆÚ¿ÉÍË

ÄÚÈÝ

ÎÒÃǹ«Ë¾ÌṩÊÀ½ç¸÷´óÆ·ÅƵĹâ¿Ì½º£¬ÈçShipley£¬Dow£¬SU-8µÈ¡£
°´ÀàÐÍÀ´·Ö£º
1.³£Óñ¡½ºÓÐS1800ϵÁУ¬BCI-3511......²»Í¬µÄÐͺŶÔÓ¦µÄ²»Í¬ºñ¶È·¶Î§ºÍ·Ö±æÂÊ£¬ºñ¶È´Ó0.5umµ½5um£¬·Ö±æÂÊ´Ó0.5umµ½1um¡£ÊÊÓÃÓÚ¸÷Àà½Ó´¥Ê½¹â¿Ì»ú£¬stepper£¬Îȶ¨ÐԺ㬹㷺ӦÓÃÓÚ°ëµ¼ÌåÖÆÔì¡£

2.³£Óúñ½ºÈçSU-8 2000£¬3000ϵÁÐÊǸºÐÔ»·ÑõÀà¹â¿Ì½º£¬¾ßÓиßÉî¿í±È£¬¹â¿Ìºó¿É´ïµ½·Ç³£ºÃµÄ¶¸Ö±¶È¡£³©Ïú¿îÕýÐÔºñ½ºSPR220£¬ºñ¶È·¶Î§1-30um£¬·Ö±æÂÊ1um£¬ÓÐÁ¼ºÃµÄ𤸽ÐÔ£¬¿ÉÓÃ×÷µç¶Æ¹¤ÒÕ£¬¹ã·ºÓ¦ÓÃÓÚMEMSºÍBump¹¤ÒÕ

3.Lift off¹â¿Ì½º³£ÓõÄÊÇKXN5735-LOºÍLORϵÁУ¬KXN5735-LO·Ö±æÂÊΪ4um£¬ºñ¶È·¶Î§2.2-5.2um£¬µ¹½Ç70¡ã×óÓÒ¡£LORÓÃÓÚË«²ã½º¹¤ÒÕÖеĵײ㽺¡£
4.»¹Óи÷ÖÖµç×ÓÊø¹â¿Ì½º£¬¾ßÓм«¼ÑµÄ·Ö±æÂÊ¡£HSQ XR-1541-006ºñ¶È·¶Î§85nm-180nm£¬·Ö±æÂÊ¿É´ï6nm¡£½ø¿Ú¡¢¹ú²úPMMAÓкܶ಻ͬµÄ·Ö×ÓÁ¿£¬¶ÔÓ¦²»Í¬·Ö±æÂÊ£¬×Ý¿í±È£»ÊÊÓÃÓÚË«²ã¹¤ÒÕ¡£

5.´ËÍ⻹ÓвÊÉ«¹â¿Ì½º£¬¹â¹Ì»¯½º£¬¸ÉĤµÈ~²»Í¬µÄ¹¤ÒÕÓ¦ÓöÔÓ¦²»Í¬µÄÐͺţ¬»¶Ó­´ó¼ÒÇ°À´×Éѯ~ÎÒ»á¸ø¸÷λÍƼöÊʺϵĹâ¿Ì½º£¬¼Û¸ñ¾ªÏ²£¬Æ·ÖÊÓÅÁ¼£¡

ËÕÖÝÑвÄ΢ÄɿƼ¼ÓÐÏÞ¹«Ë¾
Suzhou Research Materials Microtech Co., Ltd
Tel: 0512-68636965
QQ£º154733475
Fax: 0512-62872362
Phone:13776045471
Email: xujy@rdmicro.com
Address:ËÕÖݹ¤ÒµÔ°Çø¶ÀÊûºþ¸ß½ÌÇøÈôˮ·398ºÅËÕÖÝÄÉÃ×Ëù¼Ó¹¤Æ½Ì¨B705
**********************************************
ºÏ×÷µ¥Î»ÓÑÇéÁ´½Ó£º
ÖпÆÔºËÕÖÝÄÉÃ×Ëùhttp://www.sinano.cas.cn/
ÖпÆԺ΢µç×ÓËùhttp://www.ime.ac.cn/
ËÕÖÝÃÀͼ°ëµ¼Ìåhttp://www.memstools.cn/

» ²ÂÄãϲ»¶

» ÇÀ½ð±ÒÀ²£¡»ØÌû¾Í¿ÉÒԵõ½:

²é¿´È«²¿É¢½ðÌù

ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¡ï
ÑвÄ-jiali(½ð±Ò+1): лл²ÎÓë
¶¥
2Â¥2018-09-26 12:16:44
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

ÅÖ¶°

ÖÁ×ðľ³æ (ÎÄ̳¾«Ó¢)

¡ï
ÑвÄ-jiali(½ð±Ò+1): лл²ÎÓë
Ö§³Ö²¢×£¸£ÁË
3Â¥2018-09-26 12:20:16
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¡ï
ÑвÄ-jiali(½ð±Ò+1): лл²ÎÓë
4Â¥2018-09-26 12:24:44
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¡ï
ÑвÄ-jiali(½ð±Ò+1): лл²ÎÓë
5Â¥2018-09-26 12:46:12
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¡ï
ÑвÄ-jiali(½ð±Ò+1): лл²ÎÓë
6Â¥2018-09-26 12:50:15
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¡ï
ÑвÄ-jiali(½ð±Ò+1): лл²ÎÓë
7Â¥2018-09-26 12:58:01
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¡ï
ÑвÄ-jiali(½ð±Ò+1): лл²ÎÓë
8Â¥2018-09-26 13:00:41
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¡ï
ÑвÄ-jiali(½ð±Ò+1): лл²ÎÓë
9Â¥2018-09-26 13:03:29
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
¡ï
ÑвÄ-jiali(½ð±Ò+1): лл²ÎÓë
10Â¥2018-09-26 13:56:28
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
Ïà¹Ø°æ¿éÌøת ÎÒÒª¶©ÔÄÂ¥Ö÷ ÑвÄ-jiali µÄÖ÷Ìâ¸üÐÂ
×î¾ßÈËÆøÈÈÌûÍƼö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[»ù½ðÉêÇë] Ö×Áö¿Ú +5 hml2091 2024-05-20 5/250 2024-05-21 22:48 by Liu131415
[¿¼²©] ´óÀ©ÕÐ +8 version211 2024-05-21 10/500 2024-05-21 21:53 by Silencewalk
[»ù½ðÉêÇë] ¹ú×ÔÈ»µÄÃæÉÏÏîÄ¿£¬£µ¸öÉó¸åÈË£¬£µ¸öBÄÜÉÏ»áÂ𣿠5+5 lancet0903 2024-05-20 19/950 2024-05-21 20:00 by ÄϺ£Öí
[»ù½ðÉêÇë] ¹ú×ÔÈ»µÈ 85+3 ÅÖ»¢ 2024-05-21 11/550 2024-05-21 18:23 by ÅÖ»¢
[˶²©¼ÒÔ°] Ä͸ßεæƬÇó¹º +7 Sexyflea 2024-05-16 10/500 2024-05-21 15:35 by wangnc3
[»ù½ðÉêÇë] ¹úÉç¿ÆÉêÇëÊéÉÏ´«ÓÐÎó£¬Ñ§Ð£ÒÑÌá½»µ½Ê¡ÀʡÀﻹδÉóºË£¬»¹ÄÜÍË»ØÐÞ¸ÄÂ 100+3 ԶɽÇçá° 2024-05-19 6/300 2024-05-21 14:14 by Ä®ÉÏÞ¼Ëó
[»ù½ðÉêÇë] Ì«¹îÒìÁË£¬ÎåÔµ׻¹ÓÐûÓÐËÍÉóµÄ¡£¡£ +12 hdzw9071 2024-05-21 12/600 2024-05-21 12:43 by dxcharlary
[ÂÛÎÄͶ¸å] Angew¾Ü¸åÖØͶ¾­Àú´óÐÞ·µ»ØÓÖËÍÉóÁË 48+4 YOONAZHA 2024-05-18 6/300 2024-05-21 10:35 by jurkat.1640
[˶²©¼ÒÔ°] ÓÖ¼ûÆæÝâѧÉú£¬¿ÉÕ¦°ì +25 appleapple2 2024-05-17 30/1500 2024-05-21 09:13 by qyws
[»ù½ðÉêÇë] È¥ÄêÉêÇë»ù½ðµÄÆÀÉóÒâ¼ûÊÇChatGPTÔÚ¹úÄÚÊǽûÖ¹µÄ£¬Ñо¿·½°¸ÖÐÓÐʹÓÃChatGPT²»ºÏÀí +4 ˲ϢÓîÖæ 2024-05-19 4/200 2024-05-21 00:37 by dxcharlary
[˶²©¼ÒÔ°] ±»µ¼Ê¦×¥×ÅÒ»¸öÈìÑòë¸ÃÕ¦°ì +13 δÀ´¿ÉÆÚ¼òÖ±²»¶ 2024-05-15 25/1250 2024-05-20 23:03 by ca0yan9
[½Ìʦ֮¼Ò] ÇཷµÄδÀ´ÔÚÄÄÀ +17 sxhuabin 2024-05-15 18/900 2024-05-20 22:55 by ˲ϢÓîÖæ
[˶²©¼ÒÔ°] º£Íⲩʿ£¬¹úÄÚ²©ºóÕÒ¹¤×÷Çó½¨Òé +8 905452934 2024-05-16 22/1100 2024-05-20 21:42 by littlezl
[¿¼²©] 25Ä격ʿÉêÇë +6 lixinmiao9 2024-05-18 6/300 2024-05-20 11:19 by ÅáÏÈÉú533
[¿¼²©] ¡¾2025 É격¡¿²ÄÁÏ»òÕßÒ±½ð¹¤³Ì +4 ·ãÂä¹Â³Ç 2024-05-19 5/250 2024-05-20 10:52 by ·ãÂä¹Â³Ç
[»ù½ðÉêÇë] ÊýÀíѧ²¿º¯ÆÀ¼¸ºÅ½áÊø£¿ +6 ¿ÆÑйÂÓÂÕß 2024-05-16 7/350 2024-05-20 09:05 by 6543yes
[ÂÛÎÄͶ¸å] ÍƼöתͶ£¨ transfer pending£©ÊÇ·ñÓÐÓã¿ 50+3 lily5289 2024-05-17 7/350 2024-05-19 15:11 by wanghuawei
[½Ìʦ֮¼Ò] ΪºÎÒ»·½Ãæ¹úÄÚ´óѧ½ÌʦÎÞЧÄÚ¾í¹ýÀÍÊÅÊÀ£¬¶øÁíÒ»·½Ãæ¹ú¼ÒÈ´ÔÚÓ²ºË¿Æ¼¼Éϱ»¿¨²±×ÓÉîÖØ +16 zju2000 2024-05-15 20/1000 2024-05-18 07:28 by llhljsy
[»ù½ðÉêÇë] ÃæÉÏÆÀί¿ÉÄܱäΪ7¸öÁË£¬ÊǺÃÊÇ»µÄØ£¿ +20 suiyuanwgz 2024-05-15 25/1250 2024-05-17 17:05 by ÄÜѾ
[»ù½ðÉêÇë] ϵͳµ¼³öÉ걨ÊéÖвÎÓëÈËÄÇÒ»Ò³µÄ¸ñʽ£¬¿çÈëÁ½Ò³£¬ÒªÍ¨¹ýµ÷ÕûÐмä¾àµ÷Õûµ½Ò»Ò³Â𣿠+3 danisha 2024-05-15 5/250 2024-05-16 18:21 by danisha
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û