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ÏÂÃæÊdzÌÐògo athena

line x loc=-2   spac=0.2
line x loc=0   spac=0.8
line x loc=20  spac=0.8
line x loc=22  spac=0.2
line y loc=0.3  spac=0.01
line y loc=0.68  spac=0.1
line y loc=1.18  spac=0.1

init silicon c.boron=1e15  thick=0.5  orientation=100
deposit oxide thick=0.38 divisions=19 ydy=0.02
deposit silicon thick=0.3 divisions=10 ydy=0.01
illumination i.line   lambda=0.4  #¹âԴΪiÏß
illum.filter clear.fil circle sigma=0.38 transmit=0.1    #ÖØÖÃÂ˲¨ÁбíÔ²ÐÎÂ˲¨²ÎÊý͸ÉäÂÊ
projection na=.54
pupil.filter clear.fil circle
#
layout x.lo=0 z.lo=0 x.hi=24 z.hi=1
image clear win.x.lo=-2 win.z.lo=0 win.x.hi=0 win.z.hi=1 dx=-1 one.d
structure outfile=imal.str intensity mask

init silicon orient 100 c.boron=1e15 two.d

deposit nitride thick=0.02 div=5
deposit name.resist=OiR897i thick=0.5 divisions=10
rate.dev name.resist=OiR897i i.line c.dill=0.016
expose dose=240.0 num.refl=20
bake time=30 temp=100
develop kim time=50 steps=5
etch nitride thick=0.02
implant boron energy=5.7 dose=1e20 tilt=7 pears s.ox=0.001
etch name.resist=OiR897i all
etch nitride all
#

save outfile=dif4.str
tonyplot dif4.str

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