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[资源] 【分享】文献=microelectronics： past, present and future

期刊：Progress in Materials Science(IF=20.486)
作者：S. Mahajan
作者单位：Department of Chemical and Materials Engineering, Arizona State University, Tempe,AZ 85287-6006, USA
The role of materials science in microelectronics past, present and future
Contents
1. Introduction
2. Past role
2.1. Zone refining
2.2. Growth of bulk silicon crystals
3. Present role
3.1. Reduction of dislocations in III – V crystals
3.2. Degradation behavior of light emitting devices
4. Future role
4.1. Integration of dissimilar materials: two-step Epitaxy of GaN on (0001)sapphire
4.2. Growth of quantum wells, wires and dots
5. Summary
Acknowledgements
References
文件格式及大小：PDF 946K
链接：
http://www.namipan.com/d/1.pdf/e ... 522a558afbaabcb0e00

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