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国内微纳机电系统MEMS/NEMS科研单位一览
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????????????????о??????????????е?λ????????????????У????????У????? ?????? ??????????????????????????о??? http://ime.pku.edu.cn/mems/ ?????????????о??????????о?????????1995????????????????????????????????????????????????????????о?????1996????е???"???/??????????????????????"?????????????MEMS???????????????????е?????MEMS?о???????1998??4??????????????????????й????????900??????й???????????????MEMS????豸???ǹ???????????о???????????????о?????? ?廪??????????????о???????????????????о??? ?????????????????????е?????? http://dns.ime.tsinghua.edu.cn/bsgk/qijian.htm http://yqs.pim.tsinghua.edu.cn/ ????????????о???????о????????????????????????ǹ?????????о???Χ????????????????????????????·????????????????????????????????????????о???????????????????????????????? ????????????о???Χ???????????????о?????????о??????????????????????洢?????????????????????????????????????????м???????????????????????????????????????????????????????????????У????????о???λ?й??????????????????????????о???λ?? ?п????????????????????????????????????? http://www.labnano.net/ ?й???????????о?????????????????????????????????????翪????????????????о??????о???????ǹ?????????????Э?????????о??????????????500?????????????100???????????????????????????????о???????о??????????????洢??????????????????????????л????????·??????????????????????????? ??? ??????????????????????????????????????????? http://202.113.13.67/colleges/precision/cn/ ??????з??? • ????????????? • ???????????????????? • ????????????? • ???????????? • ??????????? • ??????????????????? ????? ?п??????????????????о?????????о???????м??????????????????/???????????????????? http://www.sim.ac.cn ?????????????????????о?? http://mnri.sjtu.edu.cn/ ???????????????????о????У????о??????????????????????????????????????о?????????????????????????????ǹ?????????????????MEMS???????????????????????????????????????????о???????????о????? ???????????????????/??????·?????о???/????????????о??? http://imcs.ecnu.edu.cn/ ??????????/??? MEMS ???????????????????????????????????? MEMS ???????????????????????????. ???? ?????????????/???????|?????????????????????????????????? http://coe.cqu.edu.cn/msc/ ????е????????????863??MEMS?????䴙?????973????????????????????????????/????????????????????????????????????????????????????????С???????????????????????40?????????3500????????????????????????1250??????????о?????????????????????????????????????????????????????????????????????????????о?????????????????????MEMS???????????????????????????????飬???????????Ρ??????????40??????????200????????γ??????????????о???????????????????????????????????о????????????????? ????? ????????????????????/MEMS?????????????? http://mems.seu.edu.cn/ ????????????????????????????????????????????????????????????е?????????????飬?齨????????о???????1999????????????????????????????2000??6??????????????????????2001??9????????????????2002??11????????????????? ??????????????е??????/MEMS????????о????? http://jx.njust.edu.cn/ MEMS????????о????? ?й???????????????55?о?????????????????о???MEMS???? http://www.nedi.cn/info/index.asp ????????????о?????MEMS?о????2000???????RF MEMS???о??????????MEMS???о???2002???????MEMS????????????????MEMS?з????????????????MEMS?о????????????????????????????????????????????????MEMS?????????????????????????廯??MEMS??????????????γ????MEMS?о????????????????????????????????????MEMS??????????????й??????????MEMS?з??????MEMS?????????????? ????? ?й??????????? ????????/??????????? http://ses.ustc.edu.cn/detail.ph ... 467&postid=3262 ???????????о??????????2002??????ǹ???????????????????????е??????????????????????????????????????о??????? ??????о?????????? 1. ?????????2. ???????????3. ???????????4. ???????? ?й?????????????е?о??????????????????о?????/????MEMS????? http://www.iim.ac.cn/cbscr/default.asp ????????????????????????????????????????о?????????????????????????????????????÷?????????????????????????????????????????????????????????????????????????????????м????????????????????????????????????????????????????Σ??о????????Щ???д?????????????????????в??????????????????????????????????????????á? ????? ?й???????????????????о??? http://www.cetcmems.com/ ?й???????????????????о??????????????????????????????????????????滮?????????1956?????????????????漰???????????????е????????MEMS??????????弼????????????MEMS?????о??????1990?????????????廪????????????????????????MEMS????????????????1996????????????????MEMS??????????????????????MEMS?????о???????????/?????о???????????????????????MEMS???????????????????廯???????о???????о??????漰MEMS??????????MEMS????????MEMS?????????MEMS?????????NEMS?????????????? ?????? ???п?????|?人???????????????п????????????? http://www.chinamems.com/ ???п?????????о???????人????????????????????о???????2002?????????????????????????????????????MEMS?????????????????п???????е??????????????????????????????????????MEMS?о?????????????????????????????е??????????????????????????硢IC???????????????????о????????к???????????? ?????? ???????????????е??????/??????? http://mnstlab.dlut.edu.cn/index.htm ?????????????????????????/?????????????????У???????????п???????????е??????е??????????????????????????????齨???????????????????????????????????????????о???????????????????????з????????????λ???У ??211?????????985???????????????????????????????????????? ??????繤??? ??? ????????????е?? ???????????????????????????????????????????????к??????????????????(???????????)17???о???????????????????????? ????? ?б??????????????о????? http://newmntrc.nuc.edu.cn// ?б????????????о??????????1994????????????????????????????????????????????????о??? ?????? ????????????????????о????? http://memsc.xmu.edu.cn/ 1999???????????????????????????л????????????????????????????????????????????о???????????????????????????????????????2002??2???????????????2002??9???????У?2003?????????????У????????MEMS????????????2006?????????????У????????? ??????????о????????????????????????????????????????????????????о?????????????????????о????????? ??壺 ?????_????W?????W????C?Y???W?????C???y?о????? http://nems.ntu.edu.tw ???W?????C???y?о?????????????ь??M?????K?~????傀???^????????????????????????????????δ????о????c???????????????????аl??????????????????????????A?ε??L??l?????????????A????????l????????????(Lab-on-a-chip)???аl?d??????????????????C????????аl??????A??????????????o???M???W·??y???l?CMOS?????u????????y?С????????u????g?T???????_????y?ξ??(System-On-a-Chip??SOC)?????????????_???M????????????аl?????????????????u??????????A????аl???c???????A??????????????????t?\???????y???????????????????????аl??????A??????????c?飺??????W????c????????????????????????y??????????????????W??????????????W?????W???????????y??? ???????A??W??????????c???y?о??? http://www.mems.nthu.edu.tw/ ????????c???y?о????T????c???????r?????????????????????????B?????????????????I???L????????C???y???w?????O???V???????о?????W?c?о??????M??????С????????g????????????С??????????????傀?I???????????????t?W???y?????l???y????W???y???Y?????g???y?? ?????_???????W??????????о????? http://140.116.176.21/www/ ?????M????о????}?????????W?g?r??c???g????δ?????????a?I??l??????M???е????????飺???????W????????M????z?y??????????g?????????t???á????????????????g???????аl?? δ?????...... [ Last edited by memser on 2009-1-13 at 11:59 ] |
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