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Diamond film in many field plays a very important role. As the industrialization of diamond film in engineering and market , in addition to the implementation of the diamond film large area and high speed growth, diamond film also need to reduce the production cost. And in many of the chemical vapor deposition method, hot filament CVD method with its can expand production area, production rate, the advantages of high quality synthetic diamond film win the favor of the more producers. With hot filament chemical vapor deposition (HFCVD), the depositing of diamond film deposition process into nuclear density and morphology is influenced by many factors. In this article, analyzed the influence on diamond growth rate under different inlet velocity, and the diamond film are SEM and Raman spectrum analysis of the dynamic growth behavior. Results show that the optimized process parameters conditions, with acetone as carbon source, and the filament, the condition of invariable total power intake rate has a optimal value to achieve maximum nucleation density and integral membrane continuously and evenly, geometric crystal shape is good, the best quality. |
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4Â¥2016-04-27 15:47:57
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½ö¹©²Î¿¼ in addition to the implementation of the diamond film with large area and high speed growth, diamond film also needs to reduce the production cost. And in many of the chemical vapor deposition methods, hot filament CVD method with its can expand production area, production rate, the advantages of high quality synthetic diamond film win the favor of the more producers.£¨Õâ¾ä»°ÓеãÖÐʽӢÓ In this article, the influence on diamond growth rate under different inlet velocity is analyzed .Geometric crystal shape is good and has best quality. |
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