[交流] 求教PMMA旋涂的实验方法 已有13人参与

PMMA旋涂在GaN片上，首先是不是要把PMMA用有机溶剂溶掉，比如甲苯？，然后旋涂，干燥，请问一般溶解时配PMMA浓度以及干燥的温度，有接触的过吗？干燥温度50℃能去掉甲苯吗？文献的方法，谢谢大家了。 A thin layer of PMMA was partly coated on the p-type GaN film to serve as an insulating layer. After the substrate was heated at 50°C for 20 min to improve the quality of the PMMA, a single ZnO MR was trans- ferred to the prepared p-GaN substrate and crossed the boundary with the p-GaN and PMMA. 1111.JPG

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