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[资源] 2013新著：RF-MEMS技术的实践指导（英文版）

Practical Guide to RF-MEMS

About this Book
Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books.

The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical hints given for all RF-MEMS development stages.

Provides researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts
Covers all critical steps, dealing with design, simulation, optimization, characterization and fabrication of MEMS for radio-frequency applications
Addresses frequently disregarded issues, explicitly treating the hard to predict interplay between the three-dimensional device structure and its electromagnetic functionality
Bridges theory and experiment, fundamental concepts are introduced with the application in mind, and simulation results are validated against experimental results
Appeals to the practice-oriented R&D reader: design and simulation examples are based on widely known software packages such as ANSYS and the hardware description language Verilog.

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You have free access to this contentFront Matter (pages I–XVI)
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Chapter 1
RF-MEMS Applications and the State of the Art (pages 1–39)
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Chapter 2
The Book in Brief (pages 41–55)
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Chapter 3
Design (pages 57–83)
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Chapter 4
Simulation Techniques (Commercial Tools) (pages 85–131)
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Chapter 5
On-Purpose Simulation Tools (pages 133–165)
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Chapter 6
Packaging and Integration (pages 167–194)
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Chapter 7
Postfabrication Modeling and Simulations (pages 195–239)
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You have free access to this contentAppendix A: Rigid Plate Electromechanical Transducer (Complete Model) (pages 241–286)
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You have free access to this contentAppendix B: Flexible Straight Beam (Complete Model) (pages 287–315)
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You have free access to this contentReferences (pages 317–329)
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You have free access to this contentIndex (pages 331–344)
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