Znn3bq.jpeg
ÉÇÍ·´óѧº£Ñó¿ÆÑ§½ÓÊܵ÷¼Á
²é¿´: 3658  |  »Ø¸´: 11
µ±Ç°Ö»ÏÔʾÂú×ãÖ¸¶¨Ìõ¼þµÄ»ØÌû£¬µã»÷ÕâÀï²é¿´±¾»°ÌâµÄËùÓлØÌû

ÂÞ¾üÍõ

Òø³æ (³õÈëÎÄ̳)

[ÇóÖú] ¶þÑõ»¯¹èRIE¿ÌÊ´ ÒÑÓÐ2È˲ÎÓë

ÎÒÃÇÓÐһ̨ÖпÆÔºµÄME-3AÐÍ´ÅÔöÇ¿·´Ó¦Àë×Ó¿ÌÊ´»ú£¬ÏÖÔÚ¿ÌÊ´¹èƬÒѾ­¶Ô´ïµ½×îÓÅ»¯£¬Ò»·ÖÖÓÄÜ´ïµ½600nm×óÓÒ£¬µ«ÊǶÔÓÚʯӢֻÄܼ¸Ê®ÄÉÃ×£¬ËùÒÔ¸ú´ó¼Ò½»Á÷һϿÌÊ´²ÎÊý¡£ÎÒÃÇĿǰʹÓõIJÎÊýÊÇ£ºÁ÷Á¿15£¬Ñ¹Ç¿0.5Pa£¬¹¦ÂÊ100W£¬ËÙÂÊ25nm/min
»Ø¸´´ËÂ¥

» ²ÂÄãϲ»¶

» ±¾Ö÷ÌâÏà¹ØÉ̼ÒÍÆ¼ö: (ÎÒÒ²ÒªÔÚÕâÀïÍÆ¹ã)

» ±¾Ö÷ÌâÏà¹Ø¼ÛÖµÌùÍÆ¼ö£¬¶ÔÄúͬÑùÓаïÖú:

¶à¿´¶à¶Á¶àѧϰ
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

zytsh

½ð³æ (СÓÐÃûÆø)

ÒýÓûØÌû:
7Â¥: Originally posted by quanten at 2014-09-22 23:46:42
CF4ͨ³Ô£¬CHF3Ö÷Òª¿ÌÊ´SiO2...

ͨ³ÔÖ¸µÄÊÇ¿ÉÒÔ¿ÌÊ´ºÜ¶à²ÄÁÏÂ𣿴óÖ°üÀ¨ÄÄÐ©ÄØ£¿·Ç³£¸Ðл
8Â¥2014-09-23 09:09:40
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
²é¿´È«²¿ 12 ¸ö»Ø´ð

ÂÞ¾üÍõ

Òø³æ (³õÈëÎÄ̳)

ÔõôľÓÐÈËÄØ
¶à¿´¶à¶Á¶àѧϰ
3Â¥2014-06-26 15:35:54
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

quanten

½ð³æ (ÖøÃûдÊÖ)

QQȺ(NW-FET): 157220400


¡¾´ð°¸¡¿Ó¦Öú»ØÌû

¸Ðл²ÎÓ룬ӦÖúÖ¸Êý +1
CHF3¿ÌÊ´SiO2
SF6¿ÌÊ´Si
µ÷½ÚHºÍFµÄ±ÈÀý¿ØÖÆ¿ÌÊ´SiºÍSiO2µÄÑ¡Ôñ±È
4Â¥2014-06-26 15:56:26
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû

ÂÞ¾üÍõ

Òø³æ (³õÈëÎÄ̳)

ÒýÓûØÌû:
4Â¥: Originally posted by quanten at 2014-06-26 15:56:26
CHF3¿ÌÊ´SiO2
SF6¿ÌÊ´Si
µ÷½ÚHºÍFµÄ±ÈÀý¿ØÖÆ¿ÌÊ´SiºÍSiO2µÄÑ¡Ôñ±È

ÄǸöÄãÃÇ¿ÌÊ´²ÎÊýÄØ£¿¿ÌÊ´ËÙÂÊÄܵ½´ï¶àÉÙ£¿
¶à¿´¶à¶Á¶àѧϰ
5Â¥2014-07-08 16:33:06
ÒÑÔÄ   »Ø¸´´ËÂ¥   ¹Ø×¢TA ¸øTA·¢ÏûÏ¢ ËÍTAºì»¨ TAµÄ»ØÌû
×î¾ßÈËÆøÈÈÌûÍÆ¼ö [²é¿´È«²¿] ×÷Õß »Ø/¿´ ×îºó·¢±í
[¿¼ÑÐ] Çóµ÷¼Á +11 Á§ÜÔÒ»¶¨Éϰ¶ 2026-04-10 11/550 2026-04-13 21:36 by gretl
[¿¼ÑÐ] BÇø0809 £¬ÊýÒ»Ó¢Ò»£¬290 Çóµ÷¼Á +3 ãöΫ1111 2026-04-12 4/200 2026-04-13 20:35 by ѧԱJpLReM
[¿¼ÑÐ] ÉúÎïѧ308·ÖÇóµ÷¼Á£¨Ò»Ö¾Ô¸»ª¶«Ê¦´ó£©½ÓÊÜ¿çרҵ +8 ÏàÐűػá¹ââÍòÕ 2026-04-13 8/400 2026-04-13 20:26 by biomen
[¿¼ÑÐ] 310Çóµ÷¼Á +14 666ÕæºÃ 2026-04-11 16/800 2026-04-13 16:44 by 89436494
[¿¼ÑÐ] ²ÄÁÏ¿¼Ñе÷¼Á +29 ÔÆÄ¾´ï´ï 2026-04-11 31/1550 2026-04-13 13:32 by lyh³ÀÏʦ
[½Ìʦ֮¼Ò] ɽ¶«Ë«·ÇԺУ¿¼ºË³¬¼¶ÎÞµ×Ïߣ¬Áìµ¼ÐÒÔÖÀÖ»ö£¬½ÌʦÔâÑê¿Ö +3 qut2026 2026-04-11 7/350 2026-04-12 20:24 by qut2026
[¿¼ÑÐ] µ÷¼Á +10 ÔÂ@163.com 2026-04-11 10/500 2026-04-12 09:14 by zhouyuwinner
[¿¼ÑÐ] 282£¬Çóµ÷¼Á +12 jggshjkkm 2026-04-09 14/700 2026-04-11 09:39 by Öí»á·É
[¿¼ÑÐ] 284Çóµ÷¼Á +12 archer.. 2026-04-10 13/650 2026-04-11 08:44 by zhq0425
[¿¼ÑÐ] ²ÄÁÏÀà284µ÷¼Á +40 Ïë»»ÊÖ»ú²»Ïë½âÊ 2026-04-08 48/2400 2026-04-10 23:28 by 314126402
[¿¼ÑÐ] 285Çóµ÷¼Á +9 AZMK 2026-04-07 11/550 2026-04-10 15:24 by AZMK
[¿¼ÑÐ] Çóµ÷¼Á +11 ôæôæÒ»ÊéÉú 2026-04-09 13/650 2026-04-10 10:27 by liuhuiying09
[¿¼ÑÐ] ±¾¿ÆÎ÷¹¤´ó 0856 324Çóµ÷¼Á +10 wysyjs25 2026-04-09 11/550 2026-04-10 08:37 by 5268321
[¿¼ÑÐ] Çó»úеר˶297µÚ¶þÅúµ÷¼Á +5 ʰÆâ12¡£ 2026-04-08 5/250 2026-04-09 16:43 by Ôʵ±ÊʶÈ
[¿¼ÑÐ] 0860004 Çóµ÷¼Á 309·Ö +6 Yin DY 2026-04-09 6/300 2026-04-09 10:19 by °¡Àî999
[¿¼ÑÐ] Ò»Ö¾Ô¸»ªÄÏʦ·¶´óѧ0702ÎïÀíѧ305µ÷¼Á +4 Äî³£°² 2026-04-07 6/300 2026-04-08 22:53 by bljnqdcc
[¿¼ÑÐ] Èí¼þ¹¤³ÌÇóµ÷¼Á22Èí¹¤296·ÖÇóµ÷¼Á£¬½ÓÊÜ¿çµ÷ +4 yangchen2017 2026-04-08 5/250 2026-04-08 21:56 by ÍÁľ˶ʿÕÐÉú
[¿¼ÑÐ] 287Çóµ÷¼Á +6 Fnhc 2026-04-07 6/300 2026-04-08 10:05 by xingguangj
[¿¼ÑÐ] 263·ÖBÇøÇóµ÷¼Á +6 Àînihao 2026-04-08 6/300 2026-04-08 09:38 by ÄÏ¿ªÐ¡ôë
[¿¼ÑÐ] ¼ÆËã»ú11408 287 Çóµ÷¼Á +3 LiLe5 2026-04-07 3/150 2026-04-07 23:15 by shanqishi
ÐÅÏ¢Ìáʾ
ÇëÌî´¦ÀíÒâ¼û