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永远爱家的YY金虫 (小有名气)
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[求助]
有关涂层文献中“etching” 一词的翻译问题。。。急！！
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在一篇有关采用物理气相沉积制备的TiCN涂层的文献中，看到讨论涂层成分及性能的时候提到了"etching"一词，直译过来是“刻蚀”但总感觉不太对。原文是这样的： From this table, it can be observed that all properties are affected by the variation of O2/N2 flow ratios. Especially, when the oxygen flow rate was at 4 sccm (nitrogen flow rates18 sccm), the hardness and adhesion of Ti(C,N,O) coatings reached their maximum. Further increase in oxygen flow rate would decrease the values of both. From the chemical composition, it is worthy of noting that addition of oxygen enhanced the incorporation of nitrogen into the coatings. This is probably due to oxygen etching of the deposited carbon atoms. 之后这篇文章的作者写了另外一篇文章，是前文的扩展。文章中也提到了前文的内容，但在相同的地方他的解释是： Especially, when the oxygen flow rate was at 4 sccm (nitrogen flow rate = 18 sccm), the hardness and adhesion of Ti(C, N, O) coatings reached their maximum.Further increase in oxygen flow rate would decreasethe values of both. Fig. 2 shows the variation of chemical composition with the change of gas flow ratios. It is worthy of noting that a small addition of oxygen will enhance the incorporation of nitrogen into the coatings significantly.This is probably due to the etching of the adsorbed oxygen atoms by carbon-based molecules. 似乎这两个解释有点矛盾，还是说是对"etching"这个词理解的问题。 请高人指点啊~~~ |
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