Grinding/Polishing MethodOPERATION 1 OPERATION 2 OPERATION 3 OPERATION 4
Support SiC paper Support SiC paper Support RAM cloth Support STA cloth
Abrasive P180 Abrasive P1200 Abrasive LDP 9 micron Abrasive LDP 3 micron
Flow of abrasive N/A Flow of abrasive N/A Flow of abrasive 0.5 Flow of abrasive 0.5
Lubricant Water Lubricant Water Lubricant REFLEX LUB Lubricant REFLEX LUB
Flow of lubricant N/A Flow of lubricant N/A Flow of lubricant 0.2 Flow of lubricant 0.2
Pressure 2 Pressure 2 Pressure 2 Pressure 2
Plate speed 400 Plate speed 400 Plate speed 200 Plate speed 200
Head speed 150 Head speed 150 Head speed 150 Head speed 150
Time Until Plane Time 180 Sec. Time 180 Sec. Time 180 Sec.
OPERATION 5 OPERATION 6 OPERATION 7 OPERATION 8
Support NV cloth Support Support Support
Abrasive No.1 Alumina Suspension (0.04 micron) Abrasive Abrasive Abrasive
Flow of abrasive N/A Flow of abrasive Flow of abrasive Flow of abrasive
Lubricant N/A Lubricant Lubricant Lubricant
Flow of lubricant N/A Flow of lubricant Flow of lubricant Flow of lubricant
Pressure 1 Pressure Pressure Pressure
Plate speed 150 Plate speed Plate speed Plate speed
Head speed 200 Head speed Head speed Head speed
Time 120 Sec. Time Time Time