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| Investigation of interfacial structures of nano-scale TiN/AlN multilayer by neutron and x-ray reflectometry. Digest Journal of Nanomaterials and Biostructures, 13(2) (2018), 325–335. |
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INTERFACIAL STRUCTURES OF NANO-SCALE TiN/ALN MULTILAYER BY NEUTRON AND X- RAY REFLECTOMETRY 作者  u, XM (Du, X. M.)[ 1 ] ; Zheng, KF (Zheng, K. F.)[ 1 ] ; Liu, RD (Liu, R. D.)[ 2 ] ; Chen, DF (Chen, D. F.)[ 2 ] ; Liu, YT (Liu, Y. T.)[ 2 ] ; Petrenko, VI (Petrenko, V. I.)[ 3,5 ] ; Zhang, G (Zhang, G.)[ 1 ] ; Huang, CQ (Huang, C. Q.)[ 4 ] ; Gapon, IV (Gapon, I. V.)[ 3,5 ]DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES 卷: 13 期: 2 页: 325-335 出版年:APR-JUN 2018 文献类型:Article 查看期刊影响力 摘要 Neutron reflectometry allows to characterize surfaces and interfaces of ultra-thin film layered systems down to a nanometric scale (<2 nm). It can provide a wealth of information on thickness, structure and interfacial properties in nanometer length scale. Combination of neutron and X-ray reflectometry is well suited for obtaining physical parameters of nanostructured superlattice films. In the present work nano-scale TiN/A1N multilayers with different modulation period and modulation ratio were fabricated using reactive magnetron sputtering. Neutron and X-ray reflectometry methods were used to study interface structures of multilayers. The results show that the TiN/A1N multilayers with different modulation period and fixed modulation ratio are typical spuerlattice films and have sharp interface between TiN and AIN layers. However, for TiN/A1N multilayers with variable modulation ratio there is the diffusion interface. It is explained that a coherent interface structure is formed in TiN/A1N multilayers, in which the metastable cubic A1N layer with the thickness of 2 nm forms as a result of the template effect of cubic TiN. 关键词 作者关键词:TiN/A1N; Nano-scale multilayer; Neutron and X-ray reflectometry; Interface structure KeyWords Plus:CUBIC-ALN; COATINGS; SUPERLATTICES 作者信息 通讯作者地址: Du, XM (通讯作者) 显示更多 Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Liaoning, Peoples R China. 地址: 显示更多 [ 1 ] Shenyang Ligong Univ, Sch Mat Sci & Engn, Shenyang 110159, Liaoning, Peoples R China 显示更多 [ 2 ] China Inst Atom Energy, Beijing 102413, Peoples R China 显示更多 [ 3 ] Joint Inst Nucl Res, Frank Lab Neutron Phys, Dubna 141980, Moscow Region, Russia 显示更多 [ 4 ] China Acad Engn Phys, Inst Nucl Phys & Chem, Mianyang 621900, Peoples R China 显示更多 [ 5 ] Kyiv Taras Shevchenko Natl Univ, Phys Dept, Kiev, Ukraine 电子邮件地址:du511@163.com 基金资助致谢 基金资助机构 授权号 NPL, CAEP (Key Laboratory of Neutron Physics, Chinese Academy of Engineering Physics) 2014BB05 Research Foundation of Education Bureau of Liaoning Province, China LG201620 查看基金资助信息 出版商 INST MATERIALS PHYSICS, NATL INST R&D MATERIALS PHYSICS, ATOMISTILOR STR, 105 BIS, BUCHAREST, 077125, ROMANIA 类别 / 分类 研究方向:Science & Technology - Other Topics; Materials Science Web of Science 类别:Nanoscience & Nanotechnology; Materials Science, Multidisciplinary 文献信息 语言:English 入藏号: WOS:000435462100001 ISSN: 1842-3582 其他信息 IDS 号: GJ5ZK Web of Science 核心合集中的 "引用的参考文献": 21 Web of Science 核心合集中的 "被引频次": 0 查看较少数据字段 |
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