JCWyantinterferometricopticalmetrology:basicprinciplesandnewsystemslaserfocus198265-71

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[info1]SawonPratiher;...doi:10.1117/12.2278894Event:SPIEOpticalMetrology,2017,Munich,Germanyinfo'.3.'][info4]2017info'.4.'][info5]Volume10334info'.5.']

[info1]Th.Udem,R.Holzwarth&T.W.H?nschinfo'.1.'][info2]Opticalfrequencymetrologyinfo'.2.'][info3]Nature416,233-237(14March2002)info'.3.'][info4]Nature416,233-237(14...

[info3]Proc.SPIE10294,OpticalMetrology:ACriticalReview,info'.3.'][info4]19July1999info'.4.'][info5]29-58info'.5.'][info6]10.1117/12.351667info'.6.'][info7]...

applicationsinfo'.2.'][info3]SPIE10294,OpticalMetrology:ACriticalReviewinfo'.3.'][info4]19July1999info'.4.'][info5]1-28info'.5.'][info6]10.1117/12.351660info'....

[info1]MichaelQuinteninfo'.1.'][info2]APracticalGuidetoOpticalMetrologyforThinFilmsinfo'.2.'][info3]Wileyinfo'.3.'][info4]October2012info'.4.'][info5]...

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[info1]Shirley,L.G.info'.1.']...refractionerrorsinopticalmetrologyinfo'.2.'][info3]Proc.ASPE1999AnnualMeetinginfo'.3.'][info4]1999info'.4.'][info5]无info'.5.']

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[info5]OpticalEngineering|Volume46|Issue4|Instrumentation,Measurement,andMetrologyinfo'.5.'][info6]doi:10.1117/1.2721025info'.6.'][info7]...

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lightprojectioninfo'.2.'][info3]OpticalEngineering|Volume47|Issue11Instrumentation,Measurement,andMetrologyinfo'.3.'][info4]2008info'.4.'][info5]Opt.Eng.47(11),...