查看: 4350  |  回复: 87
【奖励】 本帖被评价78次,作者shileijerry增加金币 62.4

shileijerry

至尊木虫 (知名作家)


[资源] TEM(透射电镜)在微纳电子学中的应用(英文版)

Transmission Electron Microscopy in Micro-Nanoelectronics
TEM(透射电镜)在微纳电子学中的应用(英文版)

Author(s):        Alain Claverie

Publisher:        Wiley-ISTE
Year:        2012               
Language:        English       
Pages:        248

Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in industrial research centers and fabs.
This book presents in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face to develop or optimize semiconductor layers and devices. Several of these techniques are based on electron holography; others take advantage of the possibility of focusing intense beams within nanoprobes. Strain measurements and mappings, dopant activation and segregation, interfacial reactions at the nanoscale, defect identification and specimen preparation by FIB are among the topics presented in this book. After a brief presentation of the underlying theory, each technique is illustrated through examples from the lab or fab.
Content:
Chapter 1 Active Dopant Profiling in the TEM by Off?Axis Electron Holography (pages 1–36): David Cooper
Chapter 2 Dopant Distribution Quantitative Analysis Using STEM?EELS/EDX Spectroscopy Techniques (pages 37–64): Roland Pantel and Germain Servanton
Chapter 3 Quantitative Strain Measurement in Advanced Devices: A Comparison Between Convergent Beam Electron Diffraction and Nanobeam Diffraction (pages 65–80): Laurent Clement and Dominique Delille
Chapter 4 Dark?Field Electron Holography for Strain Mapping (pages 81–106): Martin Hytch, Florent Houdellier, Nikolay Cherkashin, Shay ReboH, Elsa Javon, Patrick Benzo, Christophe Gatel, Etienne Snoeck and Alain Claverie
Chapter 5 Magnetic Mapping Using Electron Holography (pages 107–134): Etienne Snoeck and Christophe Gatel
Chapter 6 Interdiffusion and Chemical Reaction at Interfaces by TEM/EELS (pages 135–164): Sylvie Schamm?Chardon
Chapter 7 Characterization of Process?Induced Defects (pages 165–198): Nikolay Cherkashin and Alain Claverie
Chapter 8 In Situ Characterization Methods in Transmission Electron Microscopy (pages 199–218): Aurelien Masseboeuf
Chapter 9 Specimen Preparation for Semiconductor Analysis (pages 219–236): David Cooper and Gerard Ben Assayag
回复此楼

» 本帖附件资源列表

  • 欢迎监督和反馈:小木虫仅提供交流平台,不对该内容负责。
    本内容由用户自主发布,如果其内容涉及到知识产权问题,其责任在于用户本人,如对版权有异议,请联系邮箱:emuch2018@163.com
  • 附件 1 : Transmission_Electron_Microscopy_in_Micro-Nanoelectronics.pdf
  • 2014-12-11 07:59:14, 17.06 M

» 收录本帖的淘贴专辑推荐

专业书籍(外文版)WM 文献推荐 物理化学材料类书籍 经典外文书籍
无机化学科研 专业书籍【直接下载】 波谱分析与测试表征

» 猜你喜欢

» 本主题相关价值贴推荐,对您同样有帮助:

已阅   回复此楼   关注TA 给TA发消息 送TA红花 TA的回帖

yujiawen123

新虫 (初入文坛)


★★★★★ 五星级,优秀推荐

非常感谢分享
38楼2014-12-14 21:26:16
已阅   回复此楼   关注TA 给TA发消息 送TA红花 TA的回帖
简单回复
2014-12-11 08:40   回复  
五星好评  顶一下,感谢分享!
2014-12-11 13:11   回复  
五星好评  顶一下,感谢分享!
2014-12-11 17:14   回复  
五星好评  顶一下,感谢分享!
2014-12-11 17:42   回复  
五星好评  顶一下,感谢分享!
zjys58876楼
2014-12-11 17:57   回复  
五星好评  顶一下,感谢分享!
wtiger7楼
2014-12-11 19:17   回复  
五星好评  顶一下,感谢分享!
zjjxl8楼
2014-12-12 07:36   回复  
五星好评  顶一下,感谢分享!
spmaster9楼
2014-12-12 08:13   回复  
五星好评  顶一下,感谢分享!
wjy201110楼
2014-12-12 08:43   回复  
五星好评  顶一下,感谢分享!
dabaoxf111楼
2014-12-12 08:55   回复  
五星好评  顶一下,感谢分享!
muxinjin12楼
2014-12-12 09:15   回复  
五星好评  顶一下,感谢分享!
ykbenku13楼
2014-12-12 13:02   回复  
五星好评  顶一下,感谢分享!
09stone14楼
2014-12-12 13:07   回复  
五星好评  顶一下,感谢分享!
lwg315楼
2014-12-12 13:10   回复  
五星好评  顶一下,感谢分享!
2014-12-12 14:03   回复  
五星好评  顶一下,感谢分享!
chemphys17楼
2014-12-12 14:12   回复  
五星好评  顶一下,感谢分享!
2014-12-12 14:18   回复  
五星好评  顶一下,感谢分享!
kyle.wu.cn19楼
2014-12-12 15:50   回复  
五星好评  顶一下,感谢分享!
luchhi20楼
2014-12-12 17:18   回复  
五星好评  顶一下,感谢分享!
Rafayl21楼
2014-12-12 17:19   回复  
五星好评  顶一下,感谢分享!
yuanzs22楼
2014-12-12 19:22   回复  
顶一下,感谢分享!
njrlfu23楼
2014-12-12 20:05   回复  
五星好评  顶一下,感谢分享!
wangpinger24楼
2014-12-12 22:01   回复  
五星好评  顶一下,感谢分享!
2014-12-13 08:28   回复  
zym100326楼
2014-12-13 09:35   回复  
五星好评  顶一下,感谢分享!
littlema7927楼
2014-12-13 09:58   回复  
五星好评  顶一下,感谢分享!
redmoonzpc28楼
2014-12-13 12:09   回复  
五星好评  顶一下,感谢分享!
gate_open29楼
2014-12-13 16:25   回复  
五星好评  顶一下,感谢分享!
yhrcsu30楼
2014-12-13 17:54   回复  
五星好评  顶一下,感谢分享!
qqy52131楼
2014-12-13 20:00   回复  
五星好评  顶一下,感谢分享!
侯佩龙32楼
2014-12-14 14:48   回复  
五星好评  顶一下,感谢分享!
yf.li33楼
2014-12-14 17:00   回复  
五星好评  顶一下,感谢分享!
qing10834楼
2014-12-14 17:06   回复  
五星好评  顶一下,感谢分享!
xzyme35楼
2014-12-14 19:37   回复  
五星好评  顶一下,感谢分享!
2014-12-14 19:59   回复  
五星好评  顶一下,感谢分享!
wang12345637楼
2014-12-14 20:22   回复  
五星好评  顶一下,感谢分享!
枫情依39楼
2014-12-14 22:51   回复  
五星好评  顶一下,感谢分享!
冯和40楼
2014-12-14 23:02   回复  
五星好评  顶一下,感谢分享!
Will_fay41楼
2014-12-15 09:17   回复  
五星好评  顶一下,感谢分享!
haozh51242楼
2014-12-15 11:16   回复  
五星好评  顶一下,感谢分享!
mwychn43楼
2014-12-15 11:23   回复  
五星好评  顶一下,感谢分享!
redmoonzpc44楼
2014-12-15 16:12   回复  
顶一下,感谢分享!
hellopanhh45楼
2014-12-15 16:22   回复  
五星好评  顶一下,感谢分享!
mse37746楼
2014-12-15 17:07   回复  
五星好评  顶一下,感谢分享!
158934081847楼
2014-12-15 20:57   回复  
五星好评  顶一下,感谢分享!
Mikasa_zly48楼
2014-12-15 21:14   回复  
五星好评  顶一下,感谢分享!
yhrcsu49楼
2014-12-24 15:31   回复  
顶一下,感谢分享!
江一易50楼
2014-12-28 20:33   回复  
五星好评  顶一下,感谢分享!
相关版块跳转 我要订阅楼主 shileijerry 的主题更新
☆ 无星级 ★ 一星级 ★★★ 三星级 ★★★★★ 五星级
最具人气热帖推荐 [查看全部] 作者 回/看 最后发表
[公派出国] CSC公派出国及美签证申请过程 +20 zkunking 2018-12-10 30/1500 2018-12-12 06:47 by yaochzh1999
[考博] 26岁博士毕业,会不会很难找喜欢的对象 +78 荞麦花 2018-12-06 92/4600 2018-12-11 22:24 by kmustwb
[无机/物化] CuBr在空气中变成浅绿色了,会出现什么杂质呢 +3 brotex123 2018-12-09 6/300 2018-12-11 20:42 by xiaomi0401
[考研] 考研化工 +9 囡囡10 2018-12-10 19/950 2018-12-11 18:39 by nome2016
[考博] 高分子材料还是锂电? +4 老人与海2012 2018-12-10 4/200 2018-12-11 17:39 by 11507028
[晶体] 测试晶体 +3 zmmlong 2018-12-10 3/150 2018-12-11 14:19 by damning
[教师之家] 刚在高校就业,是否应该脱产做博后 +18 Brancer 2018-12-08 22/1100 2018-12-11 11:04 by ciompman
[硕博家园] 失业后的那些日子-结束 +18 舒小妹 2018-12-07 19/950 2018-12-10 17:57 by 翔子Olyfer
[留学DIY] 没offer,要申的还没开始,提交的一直没信,这阶段简直要把人折磨疯啊。。。。。 +8 latex2e 2018-12-06 13/650 2018-12-10 15:50 by Celinekele
[考博] 着急!!!求计算机专业博导 +3 ajie527 2018-12-10 3/150 2018-12-10 15:24 by crystlan_qin
[有机交流] 过柱子的给位大神 帮帮 问题多多的我啊 拜托啦 5+5 大迷糊儿 2018-12-06 17/850 2018-12-10 12:13 by Explor
[考博] 申请2019年博士研究生 +10 18366882092 2018-12-06 16/800 2018-12-10 10:25 by liuyi30
[博后之家] 博后出站是否必须严格按照进站时间满两年?可否提前出站? +6 mni123456789 2018-12-05 7/350 2018-12-10 05:20 by Mary晋
[微米和纳米] 用什么分析手段证明石墨烯薄膜表面生长了碳黑?XPS吗? +4 jichenxi0730 2018-12-06 4/200 2018-12-09 10:18 by MDScience
[硕博家园] 读博士还是去高中当老师 +17 幸福的明天 2018-12-06 21/1050 2018-12-08 21:53 by 隐形心
[硕博家园] 学术不端? +6 dyzhang1217 2018-12-07 13/650 2018-12-08 13:20 by dyzhang1217
[考博] 过来人能否给点经验,谢谢 +8 ALisa1991 2018-12-05 8/400 2018-12-08 10:45 by capricorn2000
[教师之家] 工作稳定了,有必要再考在职研究生吗? +10 糖糖糖甜 2018-12-05 15/750 2018-12-08 10:21 by zmh0611
[硕博家园] 同一个研究点,可以在发了letter之后再发paper吗? +7 蓝谙 2018-12-07 11/550 2018-12-07 14:40 by 梦在潇湘
[有机交流] DMF会和IPDI反应吗 +3 Macey 2018-12-05 3/150 2018-12-05 22:23 by nanliancheng
信息提示
请填处理意见