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★★★★★★2014书籍超级帖五五七《薄膜的掠射角沉积》2014最新书籍
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书名Glancing Angle Deposition of Thin Films 作者Matthew M. Hawkeye Department of Electrical and Computer Engineering University of Alberta Canada Michael T. Taschuk Department of Electrical and Computer Engineering University of Alberta Canada Michael J. Brett Department of Electrical and Computer Engineering University of Alberta Canada NRC National Institute for Nanotechnology 页数316 出版社wiley ISBN: 9781118847565 Preface xiii 1 Introduction: Glancing Angle Deposition Technology 1 1.1 Nanoscale engineering and glancing angle deposition 1 1.2 GLAD-vantages 4 1.2.1 Nanoscale morphology control 4 1.2.2 Broad material compatibility 6 1.2.3 Novel thin-film material properties 10 1.2.4 Compatibility with standard microfabrication processes 10 1.2.5 Scalable fabrication method 11 1.3 The roots of glancing angle deposition: oblique deposition 12 1.4 The importance of experimental calibration 13 1.5 Computer simulations of glancing angle deposition growth 15 1.6 Major application areas in glancing angle deposition technology 17 1.6.1 Energy and catalysis 17 1.6.2 Sensing applications 19 1.6.3 Optics 20 1.7 Summary and outline of the book 21 References 22 2 Engineering Film Microstructure with Glancing Angle Deposition 31 2.1 Introduction 31 2.2 Basics of conventional film growth 32 2.2.1 Physical vapour deposition 32 2.2.2 Nucleation and coalescence 33 2.2.3 Column microstructure 35 2.3 Glancing angle deposition technology: microstructural control via substrate motion 37 2.4 Engineering film morphology with 𝛼 41 2.4.1 Controlling microstructure and porosity 41 2.4.2 Directional column growth: column tilt 𝛽 44 2.5 Engineering film morphology: column steering via 𝜑 rotation 47 2.5.1 Controlling column architecture with 𝜑: helical columns 47 2.5.2 Controlling microstructure with rotation speed: vertical columns 48 2.5.3 Continuous versus discrete substrate rotation 49  QQ截图20140709130118.png |
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2014-07-09 13:02:18, 7.25 M
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