|
[×ÊÔ´]
SEM²Ù×÷¾Ñé·ÖÏí
дÔÚÇ°Í·£¬±¾ÈËÒѱÏÒµ¹¤×÷£¬ÕâЩ¶«Î÷ɾÁËҲͦ¿ÉϧµÄ£¬ËùÒÔ·ÖÏí³öÀ´¸øÓÐÐèÒªµÄÈË×ö²Î¿¼£¬¹À¼ÆÕâ¸öСľ³æÕ˺ÅÒÔºóÒ²²»»áÔõôÓÃÁË¡£
SEMʹÓõÄÊÇFEI Nova NanoSEM 450£¬±È½ÏºÃµÄÇé¿öͼÏñ¿ÉÒÔ·Å´óµ½80Íò±¶£¬×î²îÒ»µãÒ²ÊÇ10Íò±¶¡£
Part01 xT macroscope UIÈí¼þ˵Ã÷
SEM ²Ù×÷¹æ³Ì£ºÖÆÑù-¶Æ£¨Pt£©Ä¤-Vent£¨Beam µç×ÓÊøÒªÏȹرգ©£¬´øͼ±ê±ä»Ò ´ò¿ªÑùÆ·ÊÒ£¬·ÅÖÃÑùÆ·£¬¹Ø²Ö£¬Ò»ÊÖµÖסÑùÆ·ÊÒÃÅ£¬Ò»ÊÖµ¥»÷ Pump£¬îõÒ»ÉùºóÊÖ¿ÉÒÔËÉ¿ª£¬µ÷½ÚÑùƷ̨µ½ 5mm
´ýͼ±ê ±äÂ̺ó¿ÉÒÔ´ò¿ª beam£¬²âÊÔ£¬Ñ¡ÔñÇøÓò¶Ô½¹£¬µã»÷ Link £¬µ÷½¹£¬ÅÄͼ²âÊÔÍê±Ï£¬¹ØÆø¡£
+°´Êó±êÓÒ¼ü×óÓÒÍ϶¯£»µ÷ÏóÉ¢£ºShift ¼ü+°´Êó±êÓÒ¼ü×óÓÒÍ϶¯¡£ÅÄͼʱ
ÒªÔÝÍ£¼ü £¬ÅÄÑùÒ»°ãÖ»Ðèµ÷½¹ºÍÉ«É¢¡£
µ÷½ÚÏóÉ¢£ºÍ¼Ïñ»ÎµÄÌرðÀ÷º¦£¬¾Í²»ÊǺܺã¬Òª×ó¼üÉÏÏÂ×óÓÒÍ϶¯Í¼±êʹͼÏñ»ÎµÄ²»ÑÏÖØ£¬Í¼ÏñÔ¶½üÔ¶½ü£¨ºöÒþºöÏÖ£©£¬×îºÃ¾²Ö¹²»¶¯¡£
Link Z to FWD °ÑÔÀ´µÄÁãµã´Óƽ̨×îµÍ¶Ë¸ÄΪ̽ͷ£¬ÖªµÀ̽ͷºÍÑùÆ·Ö®¼äµÄ¹¤×÷¾àÀ룻¹¤×÷¾àÀë´óÓÚ 6mm£¬²»ÄÜ´Ó model 1 Çл» model 2£¬ÔÚ±£Ö¤Ì½Í·²»±»Åöµ½µÄÇé¿öϲÅÄÜŲ¶¯Õâ¸ö¾àÀë Z£¬×î¼Ñ¹¤×÷¾àÀë Z=5mm ×óÓÒ£¨Coordinate ¶Ô»°¿òµ÷ Z=5mm£ºlink Ö®ºó°ÑÑùƷ̨ÏòÏÂÀµÍ£¬¿ÉÒÔ¿´µ½ Z ²»µÈÓÚ 5mm£¬ÊäÈë Z=5mm£¬»Ø³µ Enter£¬Ë«»÷Êó±ê×ó¼ü 5mm Ïß»ØÈ¥£©¡£
×Ô¶¯¶Ô±È¶ÈºÍÁÁ¶È£º¿ì½Ý¼ü F9¡£
×Ô¶¯¶Ô½¹£¬µ«¹ý³ÌºÜÂý£¬¼«¶Ë²»Çå³þµÄʱºò½¹¾àÔÚÄÄÀïµÄʱºò¿ÉÒÔÓã¬Ò»°ãÂýÂýµ÷Ò²¿ÉÒÔÕÒµ½¡£
ÁÁ¶È¶Ô±È¶ÈÊDz»Êǵ÷µ½×î¼Ñ£¬¿ì½Ý¼ü F3£¬²¨ÐÎÖÐÑëÓëÖмä»ÆÏßÖغÏΪ¼Ñ¡£
ÕÒÑùÆ·¡¢¶Ô½¹Ê±ºò¿ìɨ£¬ÅÄÑùÆ·²Å»áÓÃÂýɨ¡£·Ö±æÂÊ£º·Ö±æÂʸßɨµÃ¸üÂý¡£
£ºÅжϵ÷½¹¹ý³ÌÖÐÌõ¿òÀïÃæºÍÍâÃæµÄ×´¿öÊÇ·ñÒ»Ñù£¬Ò»°ãÇé¿öÏÂÑ¡ÔñƽµÄ¡£
̽ͷ£ºµÍ±¶³¡µÄ̽ͷ£¬¸ß±¶³¡µÄ̽ͷ£¬ÄÜÆ×µÄ̽ͷ£»ÄÜÆ×µÄ̽ͷֻÓÐÔÚÄÜÆ×ÒѾ´ò¿ª
µÄÇé¿öϲſÉÓá£ÔÚ Model 1£¨µÍ±¶³¡£©ÏÂÓÐ 2 ¸ö¼ì²âÆ÷£¬ETD ºÍ TLD£¬ETD ÊʺÏÅÄÑùÆ·Âä²î½Ï´ó£¬¾°Éî±È½ÏÉÓеĸßÓеãµÍ£¬ETD ³öÀ´µÄÁ¢ÌåЧ¹û±È½ÏºÃ¡£TLD ÊʺÏÅľ«Ï¸½á¹¹£¬Æ½ÃæÉÏ£¬
Model 2£¨¸ß±¶Ï£©Ö»ÓÐ ETD¡£Ôڵͱ¶Ï¸ù¾ÝÑùÆ·µÄ¸ßµÍÂä²î´óСѡÔñ ETD ºÍ TLD¡£
±ê³ß£º²âÁ¿ÑùÆ·µÄ³ß´ç£»Spot£ºµç×ÓÊøµÄÊø°ßµÄ´óС£¬3.0 ²»ÐèÒªµ÷¡£High Voltage µçѹ£º¿É
ÒÔÊÖ¶¯ÊäÈë¡£
Magnification ·Å´ó±¶Êý£º¿ÉÒÔ×Ô¼ºÊäÈëÒ²¿ÉÒÔÓá°+¡±ºÍ¡°-¡±£¬£º¡°+¡±Ò»´Î¾ÍÊÇÔö¼ÓÒ»±¶£¬200 ±¶±äµ½ 400 ±¶£¬¡°-¡±ºÅÏà·´¡£¡û¡ü¡ý¡ú¿ÉÒÔÓÃÀ´Çл»ÑùÆ·£¬ÓÐÒ»¸öµ½ÁíÒ»¸öÑùÆ·¡£
Beam Stigmator ÕâÀïÒ²¿ÉÒÔµ÷ÏóÉ¢£¬Êó±ê×ó¼üÑ¡ÖÐÂýÂýÀ¶¯£»Ò²¿ÉÒÔÊó±êÓÒ¼ü +Shift ¼ü£¬ÂýÂýÍ϶¯£¬¸ù¾Ý²Ù×÷Ï°¹ßÀ´Ñ¡Ôñ¡£Beam Shift£ºÊø°ßÖÐÐIJ»½¨Òéµ÷£¬²»ÈÝÒ×Õһء£
Beam Deceleration ¼õѹ³¡Ã»ÓжÔÍ⿪·Å
ÁÁ¶È¶Ô±È¶È£ºÅĵĹý³ÌÖе÷½Ú Detectors£¨Contrast¡¢Brightness£©£¬»áÓÐÒ»°ëÊÇÔÀ´µÄÒ»°ëÊǵ÷ºÃµÄ£¬ÕûÕÅͼµÃÖØÐÂÅÄÒ»´Î£¬ËùÒÔÕûÕÅͼҪÔÚµ÷ºÃ Contrast ºÍ Brightness ²ÅÄÜÑ¡ÔñÄãÅÄͼµÄģʽ¡£·½·¨¶þ£ºÅĵĹý³ÌÖУ¬Ñ¡ÔñÓұ߶Ի°¿òµÚÈýͼ±ê£¨Ò»¸ö³¤Ò»¸ö¶Ì£©£¬Ò²ÓÐ Contrast¡¢Brightness£¬²»Ó°ÏìɨµÄͼ£¬Ï൱ÓÚÔÚÕûÕÅͼÉÏ PS¡£Í¨¹ýÁÁ¶È¶Ô±È¶ÈÌá¸ßÑùÆ·µÄââ¶È£¬ÌåÐÍÇåÎú¡£
123456 ¿ì½ÝÄ£¿é²ÎÊýÊǹ̶¨ºÃµÄ£¬1 ɨÃèʱ¼ä 300ns ·Ö±æÂÊ×îµÍ£¬2 ɨÃèʱ¼ä 500ns£¬·Ö±æÂʸßÒ»µã£¬123 ÕÒÑùÆ·µ÷½¹¹ý³ÌʹÓõÄÅÄÉãģʽ£¬456 Âýɨ¡£Ê¹ÓÃÏ°¹ßÓà 5£¬6 ģʽÑùÆ·Òª¹Ì¶¨µÄ·Ç³£ÀΣ¬ÑùÆ·»áŲ¶¯¡£
ÏßɨºÍÃæɨ£ºÒ»ÌõÏßÒ»ÌõÏßÂýÂý£¨É¨ÏÂÀ´£¬Ïßɨ¡£°´ F2£¬Ò»Ö¡Ò»Ö¡£¨100ns ͼ£©µÄµþ¼Ó£¬Ãæɨ¡£ÒªÊÇÄãµÄÑùÆ·ÈÝÒ×µçºÉ¾Û¼¯£¬ÓÃÒ»¸ö·Ç³£¶ÌµÄɨÃèʱ¼ä£¨50¡¢100ns£©£¬²»²úÉúµçºÉ¾Û¼¯£¨Ò»µÀºÚÒ»µÀ°×µÄµØ·½£©¡£
¸ß±¶ÏÂÇåÎú¶ÈµÄµ÷½Ú£ºµÍ±¶Ì½Í·µ½¸ß±¶Ì½Í·Ñ¡ºÃµÄλÖÃÈ«±äÁË£¬ÒòΪ¶þ¸ö̽ͷµÄλÖÃÊDz»Ò»ÑùµÄ¡£¸ß±¶Ï¿ÉÒÔÅÄÇå³þ¾ÍÖ±½ÓÅÄ£¬²»Çå³þ¾ÍµãÒ»ÏÂԲʮ×Ö£¬Í¼Ïñ»ÎµÄÌرðÀ÷º¦£¬¾Í²»ÊǺܺã¬Òª×ó¼üÉÏÏÂ×óÓÒÍ϶¯Í¼±êʹͼÏñ»ÎµÄ²»ÑÏÖØ£¬Í¼ÏñÔ¶½üÔ¶½ü£¨ºöÒþºöÏÖ£©£¬×îºÃ¾²Ö¹²»¶¯¡£ÔÙ½øÐе÷½¹£¬µ÷½¹ºÍµ÷ÏóÉ¢¶þ¸öͬʱ½áºÏ£¬µ÷ºÃ½¹ºó·¢ÏÖÒ»±ßÓкÜÇåÎúµÄÂÖÀª£¬Ò»±ß²»ÇåÎú£¬ÕâÖÖÇé¿öÊÇÏóɢûÓе÷ºÃ¡£µ÷½¹-µ÷ÏóÉ¢-µ÷½¹-Ôö´ó±¶Êý-µ÷ÏóÉ¢-µ÷½¹-Ôö´ó±¶Êý£¬Öظ´£¬±Æ½üÄãµÄÑùÆ·µÄÐÎò¡£ÓÐʱ»¹Òª·µµ½±ÈÄãÒªÅĵÄģʽµÍµÄ±¶ÊýÏ£¬Óиöºê¹ÛµÄ±íÏÖ¡£
Part 02 SEM²Ù×÷ÊÂÏîÓëʹÓÃÐĵÃ
Ò»¡¢ ÒýÑÔ
ɨÃèµç×ÓÏÔ΢¾µ SEM ÊÇÒ»ÖÖ³£¼ûµÄÐÎò±íÕ÷²âÊÔÒÇÆ÷£¬¹ã·ºÓ¦ÓÃÓÚ¿ÆѧÑо¿µÄ¸÷ÁìÓò£¬ÆäÖØÒªÐÔ²»ÑÔ¶øÓ÷£¬±¾ÎÄÊÇ×÷Õ߶þÄê¶àʱ¼äʹÓà SEM£¨FEI Nova NanoSEM 450£©µÄ¾Ñé×ܽᣬSEM Ïà¹Ø֪ʶÄÚÈÝÅÓ´ó£¬ÎÞ·¨ÃæÃæ¾ãµ½£¬ËùÒÔ±¾ÎĽ«¸ù¾Ý SEM ²âÊÔ³£¹æÁ÷³Ì£¬´ÓÑùÆ·ÖƱ¸¡¢ÒÇÆ÷²Ù×÷¡¢SEM ·ÖÎöÈý¸ö·½Ãæ½øÐÐÐðÊö¡£Òòʱ¼ä²Ö´Ù£¬ÈôÓдí©¾´ÇëÁ½⡣
¶þ¡¢ ÑùÆ·ÖƱ¸
ÑùÆ·ÖƱ¸ÊÇ SEM ²âÊԹؼüµÄ¹ý³ÌÖ®Ò»£¬ÏëÒªµÃµ½ÖÊÁ¿¸ßµÄ SEM ͼ£¬SEM ÖÆÑù¹ý³Ì²»¿ÉºöÊÓ¡£Æä×¢ÒâÊÂÏîÈçÏ£º
1. ÑùƷͨ³£ÔÚ¸ßÕæ¿Õ»·¾³Ï²âÊÔ£¬»Ó·¢ÐÔÈܼÁÔÚÅÄÉã SEM ͼʱӰÏì³ÉÏñЧ¹û£¬ÇÒÒ׶ÔÒÇÆ÷Ôì³ÉËðÉË£¬ÑùÆ·ÐèÒª½øÐиÉÔï¡£
2. ¸ÉÔï·½·¨¶Ô²¿·ÖÑùÆ·µÄÐÎòÓоçÁÒÓ°Ï죬Èçʯīϩ£¬ÉúÎï²ÄÁϵÈÒª±£³ÖʪÑùÐÎòµÄÑùÆ·Ðè½øÐÐÀ䶳¸ÉÔ³£¹æ¸ÉÔï·½·¨Èç¹Ä·ç¸ÉÔï¡¢Õæ¿Õ¸ÉÔïÒ×Ôì³É½á¹¹Ì®Ëú¡£
3. ¶ÔÓÚ²»Í¬ÀàÐ͵ÄÑùÆ·,Èç·ÛÄ©¡¢ËÜÁϱ¡Ä¤¡¢ÏËά¡¢¶ÏÃæ²ÄÁÏ£¬ËüÃǵÄÖÆÑù¹ý³Ì´æÔÚ׎ϴó²îÒì¡£·ÛÄ©ÑùƷͨ³£ÐèÒª½øÐÐÑÐÄ¥¹ýɸʹÆä¿ÅÁ£Ï¸»¯£¬·ÀÖ¹¿ÅÁ£Íž۶øÄÑÒԹ۲쵽¿ÅÁ£µÄÔʼÐÎò¡£ËÜÁϱ¡Ä¤Ðè²Ã¼õµ½ºÏÊÊ´óС£¬ÈçÐè¹Û²ì±¡Ä¤µÄ¶ÏÃæÐÎò£¬¿ÉÀûÓÃÒºµªÊ¹Æä´àÐÔ¶ÏÁÑ¡£³¤ÏËά¿É¼õСµ½Ò»¶¨³¤¶È£¬ÈçÐè¹Û²ìÏËάÄÚ²¿ÌØÕ÷£¬¿ÉÓÃСµ¶Ð±ÇÐÏËά¡£¶ÏÃæ²ÄÁÏÐè±£³Ö½ØÃæµÄÇå½à£¬ËüµÄ²âÊÔÄÚÈÝͨ³£»¹°üÀ¨Æäºñ¶È¡¢Ïà½çÃæµÈ¡£
4. µ¼µç½ºÓë¹èƬ£¬¶þÕßÒª×ۺϿ¼ÂÇ¡£ÎªÁËʹ·ÛÄ©ÑùÆ·ÖпÅÁ£ÔÚ SEM ͼÉÏ·ÖÉ¢¾ùÔÈ£¬¿ÉÀû
ÓÃÎÞË®ÒÒ´¼³¬Éù·ÖÉ¢£¬ÔÙ½«ÊÊÁ¿ÈÜÒºµÎÓÚ¹èƬµÄƽÕûÒ»²à£¬¸ÉÔïºóÌùÓÚµ¼µç½º¡¢¶ÆĤ¡¢²âÊÔ¡£µ«ÊÇÓÉÓÚ¹èƬµ¼µçÐÔÏà¶Ô½Ï²î£¬¸ß·Å´ó±¶ÊýÏ SEM ¹Û²ìʱÒ׳öÏֺɵçЧӦ£¬´ËÍâÔÚ½øÐÐ EDS ÄÜÆ×·ÖÎöʱ´æÔÚÇ¿ÁÒµÄ Si ÔªËط壬²»ÀûÓÚÑùÆ·Öк¬Á¿ÉÙµÄÔªËض¨Á¿¡£
5. ²»Í¬µ¼µçÐÔµÄÑùÆ·£¬µ¼µçÐÔ²îµÄÑùÆ·ÐèÀûÓÃÕæ¿Õ¶ÆĤÒÇ£¨Åç½ð¡¢Åç̼µÈ£©Ôö¼ÓÆäµ¼µçÐÔ£¬¼õÉÙÅÄÉã¹ý³ÌµÄºÉµçЧӦ£¬ÓÐÀûÓڵõ½¸ßÖÊÁ¿µÄ SEM ͼÏñ¡£
Èý¡¢ SEMÒÇÆ÷²Ù×÷
SEM ÒÇÆ÷²Ù×÷ÊÇ SEM ²âÊÔºÄʱ×¡¢×îΪÖØÒªµÄ¹ý³Ì¡£²»Í¬³§¼ÒµÄɨÃèµç¾µÒÇÆ÷²ÎÊý´æÔÚ²îÒ죬ÒÔÏÂÄÚÈÝÒÔ±¾ÈËʹÓÃµÄ FEI Nova NanoSEM 450 ɨÃèµç¾µ½øÐÐ˵Ã÷¡£SEM ²âÊÔ¹ý³ÌÐèÒª¸ù¾Ý²»Í¬²ÄÁÏ£¬¶ÔһЩÒÇÆ÷²ÎÊý½øÐÐÉèÖã¬È繤×÷µçѹ¡¢Êø°ß¡¢¹¤×÷¾àÀë¡¢¶Ô½¹ÓëÏóÉ¢¡¢¶Ô±È¶ÈÓëÁÁ¶È£¬ÆäÖ÷Òª¹Ø¼üµãÈçÏ£º
1. ½øÑùºó£¬½«ÑùƷ̨ÉÏÉýµ½Ò»¶¨Î»Öã¬Ê¹Æ乤×÷¾àÀë´ïµ½ºÏÊÊÖµ£»Ñ¡ÔñºÏÊʵĵçѹºÍÊø°ß²ÎÊý£¬²»Ò×Êܵç×ÓÊøËðÉË¡¢µ¼µçÐÔÁ¼ºÃµÄÑùÆ·¿ÉÑ¡Ôñ¸ßµçѹ£¬·´Ö®Ñ¡ÔñµÍµçѹ¡£ÔÚºÏÀíµÄ·¶Î§ÄÚ£¬¸ßµçѹºÍСÊø°ßÖµÓÐÀûÓÚÌáÉý·Å´ó±¶Êý¡£
2. Èç·Ç±¾ÈËÑùÆ·£¬ÅÄÉãÇ°ÐèÒªÓëÑùÆ·ËùÓÐÕß½øÐбØÒªµÄ¹µÍ¨£¬¶àÁ˽âÑùÆ·ÐÅÏ¢¡£
3. SEM ÅÄÉãʱ³öÏÖÔÚÆÁÄ»ÉϵĿÉÄÜÊÇÎÞÊý¸ö¿ÅÁ££¬¸÷ÖÖ¸÷ÑùµÄÐÎò£¬Ñ¡ÔñºÏÊÊλÖ㨿ÅÁ££©½øÐÐÅÄÉã¿ÉÒÔ¿ìËٵõ½ÏëÒªµÄ½á¹û£¬¶ø²»»áÂþÎÞÄ¿µÄÑ°ÕÒ£¬µ«ÕâÐèÒª¶ÔÑùÆ·ÓÐ×ã¹»µÄÁ˽âÒÔ¼°·á¸»¾Ñé¡£
4. ÀàËÆÓÚÉãÓ°ÖеÄÈ¡¾°£¬½«ÆÁÄ»ÉϵIJ»Í¬¿ÅÁ£·ÅÔÚºÏÊʵÄλÖã¬ÓÐÀûÓÚ±íÏÖ³öÑùÆ·µÄÕæʵÐÎò£¬±ãÓÚºóÆÚ¶ÔÑùÆ·µÄ·ÖÎö¡£
5. ¶Ô½¹ºÍÏóÉ¢Êǵõ½¸ß·Å´ó±¶Êý¡¢¸ßÖÊÁ¿ SEM ͼµÄ¹Ø¼üÒòËØ£¬Ç·½¹ºÍ¹ý½¹Í¨³£±íÏÖΪ SEM ͼÏñÀÉ죬ÏóÉ¢²»Õý±íÏÖΪÑùÆ·µÄ±ßԵģºý¡£¶þÕßµ÷½Ú¹ý³Ì£ºÊ×ÏÈÔڵͷŴó±¶Êýϵ÷Õû¶Ô½¹ÔÙµ÷ÏóÉ¢£¬µÃµ½ÇåÎúͼÏñºó£¬ÔÙÔڸ߷Ŵó±¶ÊýÏÂÖظ´ÉÏÊö¹ý³Ì£¬Ö±ÖÁµ½ÒÇÆ÷µÄ¼«ÏÞ·Å´ó±¶Êý¡£
6. ɨÃèģʽ£º¿ìɨºÍÂýɨ£¬Í¨³£Âýɨ¿ÉÒԵõ½ÇåÎúͼÏñ£¬ÔëµãÉÙ£»¿ìɨ¿ÉÒÔ¼õÉٺɵçЧӦµÄÓ°Ï죬Ìá¸ßͼÏñÖÊÁ¿£¬µ«ÊÇÔëµã¶à£¬Ðè¸ù¾Ý²»Í¬Çé¿ö×ÛºÏÑ¡ÔñɨÃèģʽ¡£
7. ¶Ô±È¶ÈºÍÁÁ¶È£¬¶þ¸öÒòËضÔÓÚ SEM ͼÏñÖÊÁ¿ÓÐÖ±½ÓÓ°Ïì¡£ÑùÆ·²»Í¬Î»Öõĵ¼µçÐÔ´æÔڽϴó²îÒìʱ£¬ÔÚ SEM ͼÉÏ´æÔÚ¾Ö²¿¹ýÁÁ£¬ÕûÕÅ SEM ͼÉÏÃ÷°µ²îÒìºÜ´ó£¬ÐèÒª½µµÍ¶Ô±È¶È¡£ÕâÖÖÏÖÏóÔÚµ¼µçÐÔ²îµÄÑùÆ·ÅÄÉãʱ½ÏΪ³£¼û£¬Æä¿ÉÄÜÔÒò֮һΪÅç½ð²»¾ùÔÈ¡£µ÷ÕûÁÁ¶ÈʹͼÏñ²»ÖÁÓÚ¹ý°µ»ò¹ýÁÁ£¬¾¡¿ÉÄÜʹ SEM ͼ±íÏÖ³ö¶àµÄϸ½Ú¡£
ËÄ¡¢ SEM·ÖÎö
SEM ²âÊÔ³ýÁË×î¼òµ¥µÄÐÎò¹Û²ì£¬»¹¿ÉÒÔÓ¦ÓÃÓڹ۲췴ӦǰºóµÄ±ä»¯£¬Èçµç³Ø³ä·ÅµçÇ°ºóµÄ¼«Æ¬±ä»¯£¬ÓÃÓÚÍƶϵç³ØÐÔÄÜË¥¼õµÄÔÒò¡£SEM ÊÇÒ»ÖÖÐÎò±íÕ÷¼¼Êõ£¬Ðí¶àʱºòÐèÒª½«Ëù¹Û²ìµ½µÄÐÎòÓ뻯ѧ×é³É½øÐжÔÓ¦£¬Òò´Ë SEM ÒÇÆ÷ͨ³£ÓëÄÜÆ× EDS ºÍÔªËØ·Ö²¼ mapping Á¬Óᣵ«ÊÇÓÉÓÚ SEM ·Å´ó±¶ÊýµÄÏÞÖÆ£¬EDS ºÍ mapping µÄ²âÊÔÇøÓò·¶Î§´ó£¬¶ÔÓÚС¿ÅÁ£ÑùÆ·£¬EDS ºÍ mapping ÄÑÒԵõ½µ¥¸ö¿ÅÁ£×¼È·µÄ»¯Ñ§×é³ÉÐÅÏ¢¡£
ÏëҪȫ·½Î»×¼È·Á˽âÒ»¸ö²ÄÁϵÄÐÎòÓë×é³ÉÐÅÏ¢£¬½öʹÓà SEM ²âÊÔÊÇÔ¶Ô¶²»¹»µÄ£¬»¹Ðè½áºÏÆäËû·ÖÎö¼¼Êõ£¬°üÀ¨ÐÎò¹Û²ì£¨TEM£©,ÔªËØ·ÖÎö£¨EDS¡¢XPS¡¢Mapping£©,ÎïÏà·ÖÎö£¨XRD¡¢SAED£©µÈ¡£
FEI nanoSEM 450 sjtu chem 01.jpg
1_0040.jpg
1_0041.jpg |
» ±¾Ìû¸½¼þ×ÊÔ´Áбí
-
»¶Ó¼à¶½ºÍ·´À¡£ºÐ¡Ä¾³æ½öÌṩ½»Á÷ƽ̨£¬²»¶Ô¸ÃÄÚÈݸºÔð¡£
±¾ÄÚÈÝÓÉÓû§×ÔÖ÷·¢²¼£¬Èç¹ûÆäÄÚÈÝÉæ¼°µ½ÖªÊ¶²úȨÎÊÌ⣬ÆäÔðÈÎÔÚÓÚÓû§±¾ÈË£¬Èç¶Ô°æȨÓÐÒìÒ飬ÇëÁªÏµÓÊÏ䣺libolin3@tal.com
- ¸½¼þ 1 : xT_macroscope_UI.pdf
2018-04-15 21:33:20, 273.42 K
» ÊÕ¼±¾ÌûµÄÌÔÌùר¼ÍƼö
» ±¾ÌûÒÑ»ñµÃµÄºì»¨£¨×îÐÂ10¶ä£©
» ²ÂÄãϲ»¶
|